Granted Patent
Utility
US 6,627,392
· Confirmation No. 6632
METHOD OF TRANSFERRING A PATTERN OF HIGH STRUCTURE DENSITY BY MULTIPLE EXPOSURE OF LESS DENSE PARTIAL PATTERNS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-07-23 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2003-07-23 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2003-07-23 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2003-07-23 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2002-02-11 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-02-11 | SPEC |
Specification | 9 | View | |
| 2002-02-11 | CLM |
Claims | 3 | View | |
| 2002-02-11 | ABST |
Abstract | 1 | View | |
| 2002-02-11 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2002-02-11 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-02-11 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Rainer Pforr
Dresden, GERMANY
Fritz Gans
Munchen, GERMANY
Attorneys & Agents of Record
Classification
USPC
430/394
G03F1/29
G03F1/70
G03F7/70466
Prosecution
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- Docket No.
- 1999P2502
- Confirmation No.
- 6632
Foreign Priority
199 37 742.1
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1999-08-10
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GERMANY
Publication
- Pub. No.
- US20020110753A1
- Pub. Date
- 2002-08-15
Patent Term Adjustment
-13days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-08-19
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-04-21
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Quick Facts
- Patent No.
- US 6,627,392
- App. No.
- 10/073,846
- Filed
- 2002-02-11
- Granted
- 2003-09-30
- Pub. No.
- US20020110753A1
- Examiner
- DUDA, KATHLEEN
- Art Unit
- 1756
- PTA
- -13 days
External Links