Patent Assignment
Reel/Frame 013977/0475
Assignment of Assignor's Interest
Recorded: 2003-04-17
Pages: 3
Assignor
KLEKOTKA, JAMES E.
Executed: 2003-01-14
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method and Apparatus for Monitoring a Material Processing System