Patent Assignment
Reel/Frame 013992/0534
Assignment of Assignor's Interest
Recorded: 2003-04-17
Pages: 3
Assignors
MILLER, MICHAEL ANDREW
Executed: 2003-04-14
TSUNG, JAMES H.
Executed: 2003-04-17
LUBBEN, DANIEL C.
Executed: 2003-04-14
HONG, ILYOUNG RICHARD
Executed: 2003-04-14
DING, PEIJUN
Executed: 2003-04-15
Assignee
APPLIED MATERIALS, INC.
P. O. BOX 450A, PATENT / LEGAL DEPARTMENT - M/S 2061, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Small Epicyclic Magnetron with Controlled Radial Sputtering Profile