Patent Assignment
Reel/Frame 013992/0537
Assignment of Assignor's Interest
Recorded: 2003-04-16
Pages: 3
Assignors
CHOI, SOO YOUNG
Executed: 2003-04-14
SHANG, QUANYUAN
Executed: 2003-04-15
GREEN, ROBERT I.
Executed: 2003-04-14
HOU, LI
Executed: 2003-04-14
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, P.O. BOX 450A, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Gas Distribution Plate Assembly for Large Area Plasma Enhanced Chemical Vapor Deposition