Patent Assignment
Reel/Frame 013994/0682
Assignment of Assignor's Interest
Recorded: 2003-04-21
Pages: 3
Assignor
NASSER-GHODSI, MEHRAN
Executed: 2003-04-17
Assignee
KLA-TENCOR TECHNOLOGIES, CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and Apparatus for Endpoint Detection in Electron Beam Assisted Etching