Patent Assignment
Reel/Frame 013994/0954
Assignment of Assignor's Interest
Recorded: 2003-04-22
Pages: 2
Assignor
FREIMANN, ROLF
Executed: 2003-04-08
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, D-73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for Calibrating a Radius Test Bench