Patent Assignment
Reel/Frame 014006/0879
Assignment of Assignor's Interest
Recorded: 2003-04-25
Pages: 2
Assignor
PARK, BONG-JIN
Executed: 2003-04-15
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416 MAETAN-DONG, PALDAL-GU, SUWON-CITY, KYOUNGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Vacuum/Purge Operation of Loadlock Chamber and Method of Transferring a Wafer Using Said Operation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.