Patent Assignment
Reel/Frame 014037/0865
Assignment of Assignor's Interest
Recorded: 2003-04-24
Pages: 3
Assignors
LEE, SHEN-NAN
Executed: 2002-07-29
CHEN, YING-HO
Executed: 2002-07-29
JANG, SYUN-MING
Executed: 2002-07-29
CHOU, TZU-JEN
Executed: 2002-07-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
NO. 121 PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C., TAIWAN
Covered Property
(1)
Polymeric Particle Slurry System and Method to Reduce Feature Sidewall Erosion