Patent Assignment
Reel/Frame 014054/0048
Assignment of Assignor's Interest
Recorded: 2003-05-06
Pages: 2
Assignors
LOEWENHARDT, PETER
Executed: 2003-05-05
SRINIVASAN, MUKUND
Executed: 2003-05-05
FISCHER, ANDREAS
Executed: 2003-05-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Rf Pulsing of a Narrow Gap Capacitively Coupled Reactor