Assignment of Assignor's Interest

Recorded: 2003-05-08 Pages: 5

Assignors

TOSHIMA, TAKAYUKI

Executed: 2003-04-04

ABE, HITOSHI

Executed: 2003-04-25

Assignees

TOKYO ELECTRON LIMITED

3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN

SONY CORPORATION

7-35, KITASHINAGAWA 6-CHOME, SHINAGAWA-KU, TOKYO-TO, JAPAN

Covered Property (1)

Substrate Processing Apparatus and Substrate Processing Method

Patent: 7,229,522 →

Application: 10/431,364 →

Publication: US 2004/0063319