Patent Assignment
Reel/Frame 014075/0052
Assignment of Assignor's Interest
Recorded: 2003-05-19
Pages: 2
Assignor
SEZGINER, ABDURRAHMAN
Executed: 2003-03-21
Assignee
THERMA-WAVE, INC.
1250 RELIANCE WAY, FREMONT, CALIFORNIA, 94539
Covered Property
(1)
Scatterometry by Phase Sensitive Reflectometer
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.