Patent Assignment
Reel/Frame 014076/0602
Assignment of Assignor's Interest
Recorded: 2003-05-15
Pages: 6
Assignors
WANG, WENING
Executed: 2003-02-18
SAKAMOTO, KOICHI
Executed: 2003-02-20
PARL, YOUNGCHUL
Executed: 2003-02-20
SUZUKI, FUJIO
Executed: 2003-02-20
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Heat Treatment Apparatus and Controller for Heat Treatment Apparatus and Control Method for Heat Treatment Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.