Patent Assignment
Reel/Frame 014088/0567
Assignment of Assignor's Interest
Recorded: 2003-05-22
Pages: 2
Assignor
SMITH, WALTER LEE
Executed: 2003-03-04
Assignee
THERMA-WAVE, INC.
1250 RELIANCE WAY, FREMONT, CALIFORNIA, 94539
Covered Property
(1)
Modulated Scatterometry