Patent Assignment
Reel/Frame 014099/0505
Assignment of Assignor's Interest
Recorded: 2003-05-27
Pages: 3
Assignors
YEOM, GEUN-YOUNG
Executed: 2003-04-28
LEE, DO-HAING
Executed: 2003-04-28
CHUNG, MIN-JAE
Executed: 2003-04-28
Assignee
SUNGKYUNKWAN UNIVERSITY
53, MYUNGRYUNDONG 3-GA, JONGRO-GU, SEOUL 110-745, KOREA, REPUBLIC OF
Covered Property
(1)
Etching Apparatus Using Neutral Beam