Patent Assignment
Reel/Frame 014105/0575
Assignment of Assignor's Interest
Recorded: 2003-05-21
Pages: 3
Assignor
BRCKA, JOZEF
Executed: 2003-05-19
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER 3-6 AKASAKA 5-CHOME MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Apparatus and Methods for Compensating Plasma Sheath Non-Uniformities at the Substrate in a Plasma Processing System