Assignment of Assignor's Interest

Recorded: 2003-11-07 Received: 2003-11-07 Pages: 3

Assignors

ADAMS, JOHN A

Executed: 2003-10-30

BIBBY, JR., THOMAS F.A.

Executed: 2003-11-04

Assignee

SPEEDFAM-IPEC CORPORATION

305 NORTH 54TH STREET, CHANDLER, AZ, 85226-2416, UNITED STATES

Covered Property (1)

Learning Method and Apparatus for Predictive Determination of Endpoint During Chemical Mechanical Planarization Using Sparse Sampling

Application: 09/839,631 →