IP Library › Granted Patent US 6,676,482
Granted Patent Utility
US 6,676,482 · Confirmation No. 2459

LEARNING METHOD AND APPARATUS FOR PREDICTIVE DETERMINATION OF ENDPOINT DURING CHEMICAL MECHANICAL PLANARIZATION USING SPARSE SAMPLING

Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2011-01-05 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-01-05 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-12-21 PA.. Power of Attorney 1 View
2010-12-21 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2010-12-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-11-10 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-11-07 LET. Miscellaneous Incoming Letter 1 View
2003-11-07 DRW Drawings-only black and white line drawings 3 View
2001-04-20 TRNA Transmittal of New Application 1 View
2001-04-20 SPEC Specification 16 View
2001-04-20 CLM Claims 4 View
2001-04-20 ABST Abstract 1 View
2001-04-20 DRW Drawings-only black and white line drawings 3 View
2001-04-20 OATH Oath or Declaration filed 8 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,676,482
App. No.
09/839,631
Filed
2001-04-20
Granted
2004-01-13
Pub. No.
US20020155789A1
Art Unit
3723
PTA
-8 days