Patent Assignment
Reel/Frame 014123/0686
Assignment of Assignor's Interest
Recorded: 2003-05-29
Pages: 2
Assignor
TANAKA, HIROSHI
Executed: 2003-05-22
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Position Detection Apparatus, Position Detection Method, Exposure Apparatus, Device Manufacturing Method, and Substrate