Patent Assignment
Reel/Frame 014123/0742
Assignment of Assignor's Interest
Recorded: 2003-05-28
Pages: 4
Assignors
CHEN, LI-JUI
Executed: 2003-05-20
KE, CHIH-MING
Executed: 2003-05-20
HO, BANG-CHING
Executed: 2003-05-21
SHIH, JEN-CHIEH
Executed: 2003-05-21
GAU, TSAI-SHENG
Executed: 2003-05-21
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
121 PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C, TAIWAN
Covered Property
(1)
Scatterometric Method of Monitoring Hot Plate Temperature and Facilitating Critical Dimension Control