Patent Assignment
Reel/Frame 014135/0830
Assignment of Assignor's Interest
Recorded: 2003-06-04
Pages: 9
Assignors
ADEL, MICHAEL
Executed: 2003-04-27
GHINOVKER, MARK
Executed: 2003-05-05
KASSEL, ELYAKIM
Executed: 2003-05-05
GOLOVANEVSKY, BORIS
Executed: 2003-05-28
ROBINSON, JOHN C.
Executed: 2003-05-06
MACK, CHRIS A.
Executed: 2003-05-02
POPLAWSKI, JORGE
Executed: 2003-04-27
IZIKSON, PAVEL
Executed: 2003-05-05
PREIL, MOSHE
Executed: 2003-04-25
Assignee
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Overlay Metrology and Control Method