Patent Assignment
Reel/Frame 014155/0693
Assignment of Assignor's Interest
Recorded: 2003-06-06
Pages: 19
Assignors
LEHMAN, KURT
Executed: 2003-05-06
CHEN, CHARLES
Executed: 2003-05-06
ALLEN, RONALD L.
Executed: 2003-05-06
SHINAGAWA, ROBERT
Executed: 2003-05-06
SETHURAMAN, ANANTHA R.
Executed: 2003-05-06
BEVIN, CHRISTOPHER F.
Executed: 2003-05-06
TRIKAS, TOM
Executed: 2003-05-06
CHEN, HAIGUANG
Executed: 2003-05-06
MENG, CHING LING
Executed: 2003-05-06
Assignee
KLA-TENCOR TECHNOLOGIES CORP.
ONE TECHNOLOGY WAY, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Methods and Systems for Monitoring a Parameter of a Measurement Device During Polishing, Damage to a Specimen During Polishing, or a Characteristic of a Polishing Pad or Tool