Patent Assignment
Reel/Frame 014171/0934
Assignment of Assignor's Interest
Recorded: 2003-06-16
Pages: 3
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, ARIZONA, 85226
Covered Property
(1)
Clean Room and Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.