Patent Assignment
Reel/Frame 014181/0038
Assignment of Assignor's Interest
Recorded: 2003-12-08
Pages: 3
Assignor
DAVID, JEFFREY DRUE
Executed: 2003-12-02
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Platen and Head Rotation Rates for Monitoring Chemical Mechanical Polishing