Patent Assignment
Reel/Frame 014202/0095
Assignment of Assignor's Interest
Recorded: 2003-06-17
Pages: 2
Assignor
SHIBAYAMA, NOBUYUKI
Executed: 2003-05-22
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
1-1 TENJINKITAMACHI TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Control Method of Inert Gas Concentration
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.