Assignment of Assignor's Interest

Recorded: 2003-06-26 Pages: 3

Assignor

OPSAL, JON

Executed: 2003-03-14

Assignee

THERMA-WAVE, INC.

1250 RELIANCE WAY, FREMONT, CALIFORNIA, 94539

Covered Property (1)

Optical Scatterometry of Asymmetric Lines and Structures

Patent: 7,061,627 →

Application: 10/385,863 →

Publication: US 2005/0041258

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.