Patent Assignment
Reel/Frame 014228/0947
Assignment of Assignor's Interest
Recorded: 2003-06-30
Pages: 2
Assignors
USUI, TATEHITO
Executed: 2003-02-26
YOSHIGAI, MOTOHIKO
Executed: 2003-02-25
JYOUO, KAZUHIRO
Executed: 2003-02-25
ONO, TETSUO
Executed: 2003-03-03
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Semiconductor Fabricating Apparatus with Function of Determining Etching Processing State
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.