Patent Assignment
Reel/Frame 014232/0698
Assignment of Assignor's Interest
Recorded: 2003-07-07
Pages: 3
Assignors
HYODO, YASUYOSHI
Executed: 2003-05-07
FUKAZAWA, ATSUKI
Executed: 2003-05-08
MORISADA, YOSHINORI
Executed: 2003-05-08
YAMAGUCHI, MASASHI
Executed: 2003-05-09
MATSUKI, NOBUO
Executed: 2003-05-09
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Method for Forming Low-K Hard Film