Patent Assignment
Reel/Frame 014243/0821
Assignment of Assignor's Interest
Recorded: 2003-06-26
Pages: 9
Assignors
LOMBARDI, MICHAEL J.
Executed: 2003-06-20
REYNOLDS, GLYN J.
Executed: 2003-05-20
FOSTER, ROBERT F.
Executed: 2003-06-06
ROWAN, ROBERT C. JR.
Executed: 2003-06-06
TURNER, FREDERICK T.
Executed: 2003-06-05
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Vacuum-Processing Chamber-Shield and Multi-Chamber Pumping Method