Patent Assignment
Reel/Frame 014248/0987
Assignment of Assignor's Interest
Recorded: 2003-07-09
Pages: 9
Assignors
EISELE, IGNAZ
Executed: 2003-06-16
LUDSTECK, ALEXANDRA
Executed: 2003-06-16
SCHULZE, JORG
Executed: 2003-06-16
NENYEI, ZSOLT
Executed: 2003-06-24
DIETL, WALTRAUD
Executed: 2003-06-24
ROTERS, GEORG
Executed: 2003-06-24
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Forming and/or Modifying a Dielectric Film on a Semiconductor Surface
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →