Patent Assignment
Reel/Frame 014270/0138
Assignment of Assignor's Interest
Recorded: 2003-07-03
Pages: 3
Assignors
WU, TIE JIANG
Executed: 2003-06-16
HUANG, CHIEN-CHANG
Executed: 2003-06-16
JIANG, BO CHING
Executed: 2003-06-16
TING, YU-WEI
Executed: 2003-06-16
HUANG, CHIN-LING
Executed: 2003-06-16
Assignee
NANYA TECHNOLOGY CORPORATION
HWA-YA TECHNOLOGY PARK 669, FUHSING 3 RD., KUEISHA, TAOYUAN, TAIWAN
Covered Property
(1)
Device and Method for Detecting Alignment of Deep Trench Capacitors and Word Lines in Dram Devices