Patent Assignment
Reel/Frame 014284/0943
Assignment of Assignor's Interest
Recorded: 2003-07-14
Pages: 5
Assignors
SHIMIZU, AKIRA
Executed: 2003-07-01
FUKUDA, HIDEAKI
Executed: 2003-07-01
KANAYAMA, HIROKI
Executed: 2003-07-02
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Single-Wafer-Processing Type Cvd Apparatus