Patent Assignment
Reel/Frame 014298/0561
Assignment of Assignor's Interest
Recorded: 2003-07-01
Pages: 3
Assignors
WU, WEN-BIN
Executed: 2003-06-09
WU, YUAN-HSUN
Executed: 2003-06-09
CHEN, YI-NAN
Executed: 2003-06-09
HUANG, TENG-YEN
Executed: 2003-06-09
Assignee
NANYA TECHNOLOGY CORPORATION
HWA-YA TECHNOLOGY PARK 669, FUHSING 3 RD., KUEISHAN, TAOYUAN, TAIWAN
Covered Property
(1)
Method for Enhancing Adhesion Between Reworked Photoresist and Underlying Oxynitride Film