Patent Assignment
Reel/Frame 014328/0733
Assignment of Assignor's Interest
Recorded: 2003-07-21
Pages: 3
Assignors
TAKAKUWA, MASAKI
Executed: 2003-01-22
NAKAYAMA, YOSHINORI
Executed: 2003-02-13
NAKAMURA, GEN
Executed: 2003-01-28
Assignees
ADVANTEST CORPORATION
1-32-1, ASAHI-CHO, NERIMA-KU, TOKYO, 179-0071, JAPAN
CANON KABUSHIKI KAISHA
30-2, 3-CHOME, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
HITACHI LTD
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Electron Beam Exposure Apparatus and Electron Beam Measurement Module