Patent Assignment
Reel/Frame 014339/0850
Assignment of Assignor's Interest
Recorded: 2003-07-29
Pages: 3
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method of Manufacturing Carbon Nanotube Semiconductor Device