Patent Assignment
Reel/Frame 014377/0105
Assignment of Assignor's Interest
Recorded: 2003-08-06
Pages: 3
Assignors
MUI, DAVID S.
Executed: 2003-08-04
LUI, WEI
Executed: 2003-08-04
SASANO, HIROKI
Executed: 2003-08-05
Assignee
APPLIED MATERIALS INC
PO BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Chamber Stability Monitoring Using an Integrated Metrology Tool