Patent Assignment
Reel/Frame 014378/0146
Assignment of Assignor's Interest
Recorded: 2003-08-06
Pages: 5
Assignee
MICRON TECHNOLOGY, INC.
8000 SOUTH FEDERAL WAY, BOISE, IDAHO, 83716
Covered Property
(1)
Supercritical Fluid Technology for Cleaning Processing Chambers and Systems