Patent Assignment
Reel/Frame 014382/0454
Assignment of Assignor's Interest
Recorded: 2003-08-06
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 6, LI-HSIN RD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C., TAIWAN
Covered Property
(1)
Apparatus for Visualization of Process Chamber Conditions