Patent Assignment
Reel/Frame 014436/0743
Assignment of Assignor's Interest
Recorded: 2003-08-07
Pages: 3
Assignors
ANTONI, MARTIN
Executed: 2003-06-12
SINGER, WOLFGANG
Executed: 2003-06-11
WANGLER, JOHANNES
Executed: 2003-06-10
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System Particularly for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.