Patent Assignment
Reel/Frame 014446/0587
Merger
Recorded: 2003-09-08
Received: 2003-09-12
Pages: 6
Assignor
PRI AUTOMATION, INC.
Executed: 2002-05-14
Assignee
BROOKS AUTOMATION, INC. UNDER THE NAME OF BROOKS-PRI AUTOMATION, INC.
15 ELIZABETH DRIVE, CHELMSFORD, MA, 01824, UNITED STATES
Covered Properties
(21)
Dual Arm Robot
Application:
10/434,582 →
Automated Material Handling System for Semiconductor Manufacturing Based on a Combination of Vertical Carousels and Overhead Hoists
Application:
10/393,526 →
Substrate Handling System for Aligning and Orienting Substrates During a Transfer Operation
Application:
10/267,008 →
Person-guided vehicle
Application:
10/253,735 →
Method of Removing Substrates from a Storage Site and a Multiple Substrate Batch Loader
Application:
10/244,852 →
Modular Frame for a Wafer Fabrication System
Application:
10/223,122 →
Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
Application:
60/389,993 →
Semiconductor Run-to-Run Control System with State and Model Parameter Estimation
Application:
10/171,758 →
Data Based Node Penalties
Application:
10/147,127 →
Inductive Power Transmission and Distribution Apparatus Using a Coaxial Transformer
Application:
10/134,804 →
Robot Arm Edge Gripping Device for Handling Substrates Using Two Four-Bar Linkages
Application:
10/120,673 →
Robot Arm Edge Gripping Device for Handling Substrates
Application:
10/121,152 →
Semiconductor Run-to-Run Control System with Missing and Out-of-Order Measurement Handling
Application:
10/046,359 →
Interfloor Vertical Transport and Horizontal Closure System
Application:
09/943,425 →
Web Based Tool Control in a Semiconductor Fabrication Facility
Application:
09/935,919 →
Handler for the Transporting of Flat Substrates for Application in the Semi-Conductor Industry
Application:
09/924,146 →
Fast Serial Interface Used for Controller to Robot Communications
Application:
09/918,973 →
Reticle Storage and Retrieval System
Application:
09/900,526 →
Reticle Management System
Application:
09/842,370 →
Semiconductor Wafer Imaging System
Application:
09/809,598 →
Integrated scheduler and material control system
Application:
09/804,971 →