IP Library › Patent Application 60389993
Patent Application Provisional
App. No. 60/389,993 · Confirmation No. 8690

Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

Inventor: Brian J. Doherty
Provisional Application Expired
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 Code Description Pages PDF
2002-06-19 TRNA Transmittal of New Application 1 View
2002-06-19 SPEC Specification 4 View
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Quick Facts
App. No.
60/389,993
Filed
2002-06-19