Patent Assignment
Reel/Frame 014448/0873
Assignment of Assignor's Interest
Recorded: 2003-08-26
Pages: 2
Assignors
VAN ELP, JAN
Executed: 2003-07-28
GIESEN, PETER
Executed: 2003-07-28
VAN DER VELDE, JACOB JAN
Executed: 2003-07-31
Assignee
ASML NETHERLANDS B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Chuck, Lithographic Projection Apparatus, Method of Manufacturing a Chuck and Device Manufacturing Method