Patent Assignment
Reel/Frame 014464/0199
Assignment of Assignor's Interest
Recorded: 2003-09-02
Pages: 3
Assignor
YUASA, MITSUHIRO
Executed: 2003-08-29
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Device and Processing Method