Patent Assignment
Reel/Frame 014483/0472
Assignment of Assignor's Interest
Recorded: 2003-09-12
Pages: 3
Assignors
GOUNDAR, KAMAL KISHORE
Executed: 2003-09-01
KUMAKURA, TADASHI
Executed: 2003-09-01
SATOH, KIYOSHI
Executed: 2003-09-01
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method of Forming Silicon Carbide Films