Patent Assignment
Reel/Frame 014489/0075
Assignment of Assignor's Interest
Recorded: 2003-09-12
Pages: 3
Assignors
AKAHORI, TAKASHI
Executed: 2003-07-28
CHUNG, GISHI
Executed: 2003-07-28
KAWAMURA, KOHEI
Executed: 2003-07-28
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Semiconductor Device and Fabrication Method Therefor