Confirmatory License

Recorded: 2004-04-05 Received: 2004-04-05 Pages: 3

Assignor

SANDIA NATIONAL LABORATORY

Executed: 2002-03-11

Assignee

U.S. DEPARTMENT OF ENERGY

P.O. BOX 808 (L-376), LIVERMORE, CA, 94550, UNITED STATES

Covered Property (1)

Mask-To-Wafer Alignment System

Application: 09/986,006 →