IP Library › Granted Patent US 6,642,995
Granted Patent Utility
US 6,642,995 · Confirmation No. 4590

MASK-TO-WAFER ALIGNMENT SYSTEM

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 Code Description Pages PDF
2003-09-04 IFEE Issue Fee Payment (PTO-85B) 1 View
2002-02-13 TRNA Transmittal of New Application 3 View
2002-02-13 DRW Drawings-only black and white line drawings 2 View
2001-11-07 TRNA Transmittal of New Application 2 View
2001-11-07 SPEC Specification 10 View
2001-11-07 CLM Claims 6 View
2001-11-07 ABST Abstract 1 View
2001-11-07 DRW Drawings-only black and white line drawings 2 View
2001-11-07 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,642,995
App. No.
09/986,006
Filed
2001-11-07
Granted
2003-11-04
Pub. No.
US20030086068A1
Art Unit
2851
PTA
-9 days