Patent Assignment
Reel/Frame 014496/0508
Assignment of Assignor's Interest
Recorded: 2003-09-10
Pages: 3
Assignors
MIYAIRI, HIDEKAZU
Executed: 2003-08-28
SHIMOMURA, AKIHISA
Executed: 2003-09-01
TAKANO, TAMAE
Executed: 2003-09-01
KOYAMA, MASAKI
Executed: 2003-09-01
TANAKA, KOICHIRO
Executed: 2003-09-01
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Laser Apparatus, Laser Irradiation Method, and Manufacturing Method of Semiconductor Device