Patent Assignment
Reel/Frame 014502/0906
Assignment of Assignor's Interest
Recorded: 2003-09-17
Pages: 3
Assignors
MIYAIRI, HIDEKAZU
Executed: 2003-09-01
SHIMOMURA, AKIHISA
Executed: 2003-08-29
TAKANO, TAMAE
Executed: 2003-08-29
KOYAMA, MASAKI
Executed: 2003-09-03
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Laser Apparatus, Laser Irradiation Method, and Manufacturing Method of Semiconductor Device