Assignment of Assignor's Interest

Recorded: 2003-09-22 Received: 2003-09-24 Pages: 2

Assignors

LUHN, GERHARD

Executed: 2001-08-13

SARLETTE, DANIEL

Executed: 2001-08-20

Assignee

INFINEON TECHNOLOGIES AG

ST. -MARTIN-STRASSE 53, MUENCHEN, DEX, 81669, GERMANY

Covered Property (1)

Control System and Methods for Photolithographic Processes

Application: 09/919,230 →