Granted Patent
Utility
US 6,645,683
· Confirmation No. 5557
CONTROL SYSTEM AND METHODS FOR PHOTOLITHOGRAPHIC PROCESSES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-22 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-07-31 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-07-31 | SPEC |
Specification | 22 | View | |
| 2001-07-31 | CLM |
Claims | 4 | View | |
| 2001-07-31 | ABST |
Abstract | 1 | View | |
| 2001-07-31 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-07-31 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Gerhard Luhn
Radebeul, GERMANY
Daniel Sarlette
Radebeul, GERMANY
Attorneys & Agents of Record
Classification
USPC
430/30
G03F7/70558
G03F7/70625
G03F7/70633
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Docket No.
- L&L-I0165
- Confirmation No.
- 5557
Foreign Priority
100 37 243.0
·
2000-07-31
·
GERMANY
Publication
- Pub. No.
- US20020012861A1
- Pub. Date
- 2002-01-31
Patent Term Adjustment
-5days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-09-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-09-22
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Quick Facts
- Patent No.
- US 6,645,683
- App. No.
- 09/919,230
- Filed
- 2001-07-31
- Granted
- 2003-11-11
- Pub. No.
- US20020012861A1
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- -5 days
External Links